Structure and tribological characteristics of TiAlZrN-InSn system based coatings

Thin composite solid lubricating coatings (SLC) TiAlZrN and TiAlZrN-InSn were obtained by sputtering (Ti, Al, Zr, InSn) of cathodes of different magnetrons. The structure, elemental and phase composition were studied by electron microscopy, X-ray spectral and X-ray diffraction analysis. The surface globularity of the coatings signi cantly increased with increasing indium content and decreasing Al/Zr concentration ratio. Different phase compositions were obtained in the coatings depending on the ratio of the main components: single-phase TiAlZrN with the lattice period a close to 4.24 Å, two-phase with InSn, two-phase, including nitride TiAlZrN with the lattice period ~4.24 Å, and ZrTiAlN, where a = 4.29-4.58 Å, and three-phase with InSn. The microhardness of the coatings reached 1056 HV0,05 with the highest values for a two-phase nitride structure. Tribological tests were carried out in the reciprocating wear mode. The friction coef cients of the coatings varied from 0.20 to 0.33. The lowest wear was obtained for coatings containing two nitride phases and indium in an amount of less than 3.7 at.%.